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提出了一种新的制造微透镜的制作方法。该方法基于CO2激光与玻璃材料的热透镜效应,在玻璃基片上制作微透镜阵列,是一种低成本、高效率的制备玻璃微透镜阵列的方法。采用CO2激光照射在模板上,模板上通光部分为圆孔阵列,利用金属孔阵模板进行选择性投影扫描加工,通过实验数据分析,合理的控制离焦距离,激光功率和辐照时间,可以制造微透镜阵列。最后用共聚焦显微镜及光纤探针扫描仪对微透镜的轮廓及聚焦光斑进行了检测,样品的轮廓曲线较为平滑、对称,且具有较好的聚光能力,证实了该方法的可行性与可靠性。
A new method of making micro-lens is proposed. The method is based on the thermal lens effect of CO2 laser and glass material to fabricate a microlens array on a glass substrate, which is a low cost and high efficiency method for preparing a glass microlens array. The CO2 laser is used to irradiate the template. The pass-through part of the template is a circular array of holes. A selective projection scanning process is performed by using a metal aperture array template. Through the experimental data analysis, the defocus distance, the laser power and the irradiation time can be controlled reasonably Manufacturing a microlens array. At last, the contour of the microlens and the focused spot were detected by confocal microscope and fiber probe scanner. The profile curve of the sample was smooth and symmetrical, and had good light gathering ability. It proved the feasibility and reliability of the method Sex.