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对超净介质中的颗粒计数理论进行了详细的分析 ,建立了同轴采光和异轴采光结构的数学模型 ,得出光通量和粒径之间的对应关系 ,并通过数值计算 ,对可能影响计数效率的几个因素进行了分析讨论。
The particle counting theory in ultra-clean media is analyzed in detail. The mathematical model of coaxial lighting and out-of-axis lighting structure is established, and the corresponding relationship between luminous flux and particle size is obtained. By numerical calculation, Several factors of efficiency are analyzed and discussed.