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在玻璃基片上采用金属Al靶在溅射气体Ar和反应气体O2的混合气体中,真空磁控溅射半透明的Al-Al2O3金属陶瓷薄膜,再将沉积薄膜的玻璃基片浸入沸腾的去离子水中氧化,制备成陶瓷增透膜。优化镀膜工艺和沸水氧化时间,在3.2 mm厚的低铁玻璃载片上单面沉积的增透膜的太阳透射比Te由未镀膜原片的90.4%增加到93.9%,提高了3.5%,可见光透射比Tv由91.6%增加到95.5%,提高了3.9%。双面沉积增透膜玻璃载片的Te达到96.2%,增加了5.8%,Tv达到97.2%,增加了5.6%。经过400℃高温持续40 min烘烤后膜层的光学性能基本不变。
In the mixed gas of sputtering gas Ar and reactive gas O2 on a glass substrate using a metal Al target, a translucent Al-Al2O3 cermet film was vacuum magnetron-sputtered, and the deposited glass substrate of the film was immersed in boiling deionized Water oxidation, prepared into ceramic AR coating. Optimized coating process and boiling water oxidation time, the solar transmittance Te of the AR coating deposited on one side of the 3.2 mm thick low-iron glass slide increased from 90.4% to 93.9% of the uncoated one, increased by 3.5%. Visible light transmission Tv increased from 91.6% to 95.5%, an increase of 3.9%. The Te deposited on the double-coated AR glass reached 96.2%, an increase of 5.8% and the Tv reached 97.2%, an increase of 5.6%. After 400 ℃ high temperature for 40 min after baking the optical properties of the film basically unchanged.