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为了提高使用长程轮廓仪对筒状超光滑非球面进行面型测量的精度,研究并总结了测量过程中常见的误差源及校正方法。针对测量过程中对结果影响较大的转台转轴与待测筒状镜光轴之间的倾斜和偏心误差做了详细的分析,提出利用数据处理校正这部分误差的方法。编写了相应的数据处理程序,通过数值模拟实验对该程序进行了验证。实验结果表明,该程序能够有效去除转台转轴与待测镜之间倾斜和偏心产生的系统误差,提高长程轮廓仪用于筒状镜面型测量时的测量精度。在转台转轴与待测镜之间具有5μm的偏心和大约1′的倾斜时,使用该程序还原50nm量级的面型轮廓,还原精度为均方根值(RMS)2.8nm,峰谷值(PV)18.5nm。
In order to improve the precision of surface measurement of cylindrical super-smooth aspheric surface by using long-range profilometer, the common error sources and calibration methods in the measurement process are studied and summarized. Aiming at the tilt and eccentricity errors between the rotary axis of the turntable and the optical axis of the cylindrical mirror to be measured, which have a great influence on the measurement results, the method to correct this part of error by data processing is put forward. Prepared the corresponding data processing program, verified by numerical simulation experiment. The experimental results show that this program can effectively remove the systematic errors caused by the tilt and eccentricity between the rotating shaft of rotary table and the mirror to be measured, and improve the measuring accuracy of the long-range profiler when it is used in cylindrical mirror-type measurement. This procedure was used to reduce the surface profile on the order of 50 nm with an eccentricity of 5 μm and a tilt of about 1 ’between the turret axis and the mirror to be measured, with a reduction accuracy of 2.8 nm for root mean square (RMS), PV) 18.5 nm.