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分析了半导体光电探测器光谱响应度的测试原理; 研制了一套波长为0.4~1.1 μm 的光谱响应度测试装置。该装置采用双光路替代法, 可以测试绝对光谱响应度、相对光谱响应度和量子效率, 并可减小光源不稳定性对测试结果的影响, 最终给出了测试结果比对。
The principle of measuring the spectral responsivity of a semiconductor photodetector was analyzed. A set of spectral responsivity test equipment with a wavelength of 0.4 ~ 1.1 μm was developed. The device uses a dual optical circuit alternative method, which can test the absolute spectral responsivity, relative spectral responsivity and quantum efficiency, and reduce the impact of light instability on the test results. Finally, the test results are compared.