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结合光子筛与二元衍射光学元件,提出一种新型的具有更高衍射效率的光子筛——二元光子筛,这种光子筛在对应菲涅尔透光环带及不透光环带上都分布有大量透光小孔,且两种位置处的小孔存在π的位相差。研究了二元光子筛的设计理论方法并根据指标对工作波长为650 nm的二元光子筛进行了设计。通过多次光刻、反应离子蚀刻等微加工工艺制作出二元光子筛;并对其展开如衍射效率、透射波前等特性的测试。
A new type of photon sieve-binary photon sieve with higher diffraction efficiency is proposed based on photonic sieve and binary diffractive optical element. The photon sieve is on the corresponding Fresnel transparent ring and opaque ring A large number of light-transmitting holes are distributed, and there are π-phase differences between the holes at the two positions. The design theory of binary photonic sieve was studied and the binary photon sieve with working wavelength of 650 nm was designed according to the index. Binary photonic sieves were fabricated by multiple photolithography, reactive ion etching and other micromachining processes, and their properties such as diffraction efficiency and transmitted wavefront were tested.