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显微系统的自动调焦是实现高精度测量的重要技术。采用偏心光束法,以半导体激光器作为光源,激光束与主光路光轴偏心入射到显微系统中,离焦引起反射光位置改变而获得离焦信息,用二象限硅光电池接收,光电信号经差分放大、微机处理、功放后,驱动直流电机拖动微动工作台进行离焦量补偿,从而实现显微系统的自动调焦。实验结果表明:在离焦1000μm 范围内,达到±0.1μm 精度。
Microscopic system autofocus is an important technique for high-precision measurement. Using eccentric beam method, the semiconductor laser as a light source, the laser beam and the optical axis of the optical path eccentric incident into the microscopy system, defocus caused by changes in the position of the reflected light to obtain defocus information, with a two-quadrant silicon photocell to receive the differential optical signal Amplification, computer processing, power amplifier, the drive DC motor drive fretting table offset amount of compensation, in order to achieve microscopic system auto-focus. Experimental results show that: in the defocus 1000μm range, to ± 0.1μm accuracy.