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利用低压金属有机化学气相沉积(LP-MOCVD)技术,在表面含有ZnO颗粒作为催化剂的Si(111)衬底上制备了ZnO纳米柱阵列。采用X射线衍射(XRD)、喇曼光谱(Raman)、扫描电子显微镜(SEM)、光致发光(PL)谱分析了样品的晶体结构质量、表面性质和光学性质。结果表明,生长出来的纳米ZnO具有较好的c轴择优取向性。发现氧分压对ZnO纳米柱的生长有重要影响:当氧分压较低时,生长基于VLS机制;当氧分压较高时,生长基于VS机制;通过对N2O流量的控制可实现对ZnO纳米材料的可控生长。
ZnO nano-column arrays were prepared on low-pressure metal-organic chemical vapor deposition (LP-MOCVD) on Si (111) substrate containing ZnO particles as catalyst. The crystal structure, surface properties and optical properties of the samples were analyzed by XRD, Raman, SEM and PL spectra. The results show that the grown ZnO nanoparticles have better c-axis preferred orientation. It is found that the partial pressure of oxygen has an important influence on the growth of ZnO nanorods: when the oxygen partial pressure is low, the growth is based on the VLS mechanism; when the oxygen partial pressure is high, the growth is based on the VS mechanism; Controllable growth of nanomaterials.