论文部分内容阅读
微波加热的化学气相沉积(CVD)过程可以有效地达到沉积多晶金刚石涂层的要求。在七十年代后期苏联的研究发现高温和高原子氢密度是形成金刚石的必要条件,而不会形成石墨或其它形式的碳。有几种方法可以满足这种条件,但是微波等离子清洁,容易控制。匹兹堡的西屋科学技术中心已经研制成功满足特定要求的金刚石涂层。金刚石的性能由沉积条件来控制,金刚石涂层可以应用在军用的红外线透视窗的保护上,因为红外线透视窗很软,容易被风沙和
Microwave heating of the chemical vapor deposition (CVD) process can be effectively deposited polycrystalline diamond coating requirements. In the late 1970s Soviet studies found that high temperatures and high atomic hydrogen densities were necessary for the formation of diamond without the formation of graphite or other forms of carbon. There are several ways to meet this condition, but the microwave plasma is clean and easy to control. Westinghouse Technology Center in Pittsburgh has developed diamond coatings that meet specific requirements. The performance of diamond is controlled by the deposition conditions. The diamond coating can be applied to the protection of the military infrared window because the infrared window is very soft and easy to be sand and sand