Dry machining has become a key issue to significantly reduce the wastes of used lubricants and cleaning agents and to improve the environmental consciousness for medical and food applications of special tooling. Since the tools and metallic works are in direct contact in dry, severe adhesive wear and oxidation are thought to occur even at the presence of hard protective coatings. Self-lubrication mechanism with use of lubricous oxide films is found to be effective for dry machining. Through the chlorine ion implantation to tools, titanium base oxides are in-situ formed on the tool surface. This oxide deforms elasto-plastically so that both friction coefficient and wear volume are reduced even in the high-speed cutting. Dry machining has become a key issue to significantly reduce the wastes of used lubricants and cleaning agents and to improve the environmental consciousness for medical and food applications of special tooling. Since the tools and metallic works are in direct contact in dry, severe adhesive wear and oxidation are thought to occur even at the presence of hard protective coatings. Self-lubrication mechanism with use of lubricous oxide films is found to be effective for dry machining. Through the chlorine ion implantation to tools, titanium base oxides are in situ formed on the tool surface. This oxide deforms elasto-plastically so that both both friction coefficient and wear volume are reduced even in the high-speed cutting.