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双极事业部五分厂在圆片生产过程中出现这样一个问题;“做完铝布线后发现电极孔接触电阻大”。这一问题对生产造成很大影响,阻碍了一部分产品成品率的提高。为解决这一问题,由双极五分厂负责蒸发工艺的同志和支援中心工艺室共同组成课题组对这一问题共同分析探讨,做了一些
Bipolar Division five factories in the wafer production process such a problem; “done after the aluminum wiring found that the electrode hole contact resistance.” This issue has a great impact on production, hindering the improvement of the yield of some products. To solve this problem, bipolar five branch is responsible for evaporating the process comrades and support center technology group composed of research groups to jointly analyze this issue, do some