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基于MEMS(微机电系统)光谱传感器开发了一款微型智能近红外光谱仪,通过控制微机电法珀腔的两层高反射率薄膜之间的电压,改变薄膜之间静电力的大小来控制薄膜之间空气隙的厚度,从而实现时间顺序的干涉滤波;采用漫反射式光谱采样系统,设计了照度均匀的Φ40mm近红外采样光斑和二片式非球面光学系统;光谱仪采用智能手机控制,开发了Android平台的光谱采集软件,将光谱数据通过移动网络上传到光谱云平台进行分析处理。针对聚苯乙烯薄膜进行了光谱扫描的重复性测试,连续测试20次,光谱曲线标准偏差在0.0001-0.0002之间,光敏二极管温升1.3℃,满足实际使用要求。
Based on the MEMS (Micro Electro Mechanical Systems) spectral sensor, a micro-intelligent NIR spectrometer was developed to control the film by controlling the voltage between the two layers of high reflectivity film in the Fabry-Perot chamber and changing the electrostatic force between the films The air gap thickness, in order to achieve time-series interference filter; using diffuse reflection spectral sampling system, designed a uniform illumination Φ40mm near-infrared sampling spot and two-slice aspheric optical system; spectrometer using a smart phone control, the development of Android The platform of spectral acquisition software, the spectral data uploaded to the cloud through the mobile network platform for analysis and processing. The repeatability test of spectral scanning for polystyrene film was carried out continuously for 20 times. The standard deviation of spectral curve was between 0.0001-0.0002 and the temperature of photodiode was 1.3 ℃, which satisfied the practical requirements.