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精确的波前探测是反射镜面型检测及光束波前畸变测量的重要依据,论文根据SharkHartmann理论对波前探测技术进行了模拟和实验研究。将平行光经过球面透镜/柱面透镜后形成的球面波/柱面波作为探测波前。实验采用商用的微透镜阵列和CCD搭建Shark-Hartmann传感器,利用实际光束作为参考光,避免了参考光的不准直性对实验的影响。模拟计算结果表明平均曲率误差为13.423mm,实验结果实现了对球面/柱面/倾斜波的探测及复原。
Precise wavefront detection is an important basis for specular reflection detection and beamfront distortion measurement. According to Shark Hartmann theory, the wavefront detection technology is simulated and experimentally studied. The parallel wave through the spherical lens / cylindrical lens formed after the spherical wave / cylindrical wave as the detection wavefront. In the experiment, a Shark-Hartmann sensor was constructed by using a commercial microlens array and CCD, and the actual light beam was used as the reference light to avoid the influence of the reference light misalignment on the experiment. The simulation results show that the average curvature error is 13.423mm. The experimental results have achieved the detection and restoration of spherical / cylindrical / inclined waves.