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光学成像检测设备的快速自动对焦是基于机器视觉快速缺陷检测的关键,为了解决检测过程中不同倍数物镜景深(0.5~91μm)跨度大以及被检测物体振动给快速对焦造成的影响等问题,提出了基于激光三角法的显微镜离焦在线检测及补偿方法。该方法利用激光三角法进行离焦量和离焦方向的快速探测,使用由行程100μm的压电陶瓷和行程25 mm直流电机构成的宏微双驱动结构协同控制完成大范围对焦任务。实验结果表明,构建的宏微结构对焦方式可以在0.4 s内实现高倍物镜±0.5μm景深至低倍物镜±91μm景深大范围的快速自动对焦,并实现被检测物体±3μm振动范围的快速自动跟随对焦。该方法满足了新一代薄膜场效应晶体管液晶显示器(TFT-LCD)工业检测装备对自动化对焦范围、速度和精度的要求,同时可应用在平板显示器(FPD)检测、线路板检测、生物医学和自动机器装配等领域。
In order to solve the problems of large depth of field (0.5 ~ 91μm) and the influence of the detected object vibration to fast focusing, the rapid autofocus of the optical imaging inspection equipment is based on the key of the machine vision rapid defect detection. On - line Detection and Compensation Method of Microscope Defocus Based on Laser Trigonometry. The method uses the laser triangulation method to rapidly detect the defocusing and defocusing directions. The macro-micro dual-drive structure composed of a piezoelectric ceramic with a travel distance of 100μm and a DC motor with a travel of 25mm can accomplish the large-scale focusing task cooperatively. Experimental results show that the built-in macrostructure focusing method can realize rapid autofocusing in a wide range of ± 0.5μm depth of field to low magnification ± 91μm depth of field in 0.4 s, and realize rapid and automatic follow-up of ± 3μm vibration range of the detected object Focus. The method meets the requirements of auto-focusing range, speed and accuracy of a new generation of TFT-LCD industrial inspection equipment and can be applied to flat panel display (FPD) testing, circuit board testing, biomedical and automatic Machine assembly and other fields.