原子层沉积技术因其具有精确的沉积厚度控制、良好的保形性、均匀性等特点,已经成为一项重要的薄膜沉积技术。而粉体材料作为材料的一种重要的表现形式,其改性技术对整个材料行业都具有重大意义。原子层沉积在粉体材料特别是纳米粉体的表面改性方面也有其应用。综述了原子层沉积的原理及其在粉体材料处理方面的进展。 Atomic layer deposition technology has become an important thin film deposition technology because of its precise deposition thickness control, good shape retention and uniformity. The powder material as an important form of material, the modification of the entire material industry are of great significance. Atomic layer deposition in powder materials, especially nano-powder surface modification also has its applications. The principle of atomic layer deposition and its progress in powder material processing are reviewed.