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来自美国 Ｉｏｎ Ｏｐｔｉｃｓ公司的工程师们和Ｊｅｔ Ｐｒｏｐｕｌ－ｓｉｏｎ实验室(ＪＰＬ)的研究者合作开发出了一种微小光学机电系统(ＭＯＥＭＳ)装置用于ＣＯ２探测,意欲利用光学技术在性能上的优势来取代现在的电化学方法。２００１年１０月,ＳＰＩＥ主办的“精细加工和精细制
Engineers from Ion Optics in the United States and researchers at Jet Propulsion Laboratory (JPL) worked together to develop a micro-electro-mechanical systems (MOEMS) device for CO2 detection that seeks to capitalize on the performance benefits of optics Replace the current electrochemical method. In October 2001, SPIE sponsored the "fine processing and fine system