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An ultra-small integrated photonic circuit has been proposed,which incorporates a high-quality-factor passive micro-ring resonator(MR) linked to a vertical grating coupler on a standard silicon-on-insulator(SOI) substrate.The experimental results demonstrate that the MR propagation loss is 0.532 dB/cm with a 10μm radius ring resonator,the intrinsic quality factor is as high as 202.000,the waveguide grating wavelength response curve is a 1 dB bandwidth of 40 nm at 1540 nm telecommunication wavelengths,and the measured fiber-to-fiber coupling loss is 10 dB.Furthermore,the resonator wavelength temperature dependence of the 450 nm wide micro-ring resonator is 54.1 pm/℃.Such vertical grating coupler and low loss MR-integrated components greatly promote a key element in biosensors and high-speed interconnect communication applications.
An ultra-small integrated photonic circuit has been proposed, which incorporates a high-quality-factor passive micro-ring resonator (MR) linked to a vertical grating coupler on a standard silicon-on-insulator (SOI) substrate. that the MR propagation loss is 0.532 dB / cm with a 10 μm radius ring resonator, the intrinsic quality factor is as high as 202.000, the waveguide grating wavelength response curve is a 1 dB bandwidth of 40 nm at 1540 nm fiber-to-fiber coupling loss is 10 dB. Morerther, the resonator wavelength temperature dependence of the 450 nm wide micro-ring resonator is 54.1 pm / ° C.Such vertical grating coupler and low loss MR-integrated components greatly promote a key element in biosensors and high-speed interconnect communication applications.