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微纳操作技术是在微/纳米尺度上制造具有特定功能结构与器件的方法,该技术获得广泛的关注和研究.本文阐述了微纳操作的概念、意义,介绍微纳操作的相关技术,以基于原子力显微镜(AFM)的机器人化微纳操作技术为重点,回顾AFM微纳操作的发展历程,探讨AFM探针定位与操作等关键技术问题,并提出相应的解决方案,最后对当前微纳操作中关注的几个关键技术问题进行了展望.
The technology of micro / nano manipulation is a method of fabricating structures and devices with specific functions on the micro / nano scale, and this technique has drawn extensive attention and research.This paper describes the concept and significance of micro / nano manipulation and introduces the related technologies of micro / Focusing on the robotized micro / nano manipulation technology based on atomic force microscope (AFM), this paper reviews the development of AFM micro / nano operation, discusses the key technical problems of AFM probe positioning and operation, and puts forward corresponding solutions. Finally, In the concern of several key technical issues are forecast.