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为同时提高金属网栅屏蔽效率及红外透过率,要求激光直写线条细且均匀。而工件面型误差、光刻胶涂布不均匀性、机械轴系误差等会造成写入焦斑离焦,影响线条线宽及均匀性。需引入聚焦伺服系统来实时探测并补偿离焦,确保写入光束实时聚焦在光刻胶面上。给出了临界角法调焦的原理,搭建了由探焦光路、离焦信号前放、压电陶瓷微位移执行机构组成的聚焦伺服系统,进行了离焦误差静态特性实验研究。实验结果表明:系统的静态分辨力为±40 nm,线性范围为±5μm,均满足设计要求。
In order to improve the shielding efficiency and the infrared transmittance of the metal grid at the same time, it is required that the laser straight writing line be thin and even. The workpiece surface error, uneven photoresist coating, mechanical axis error will cause write focal spot defocus, affecting the line width and uniformity. A focus servo system needs to be introduced to detect and compensate defocus in real time, ensuring that the writing beam is focused on the photoresist surface in real time. The principle of critical angle focusing was given. A focusing servo system consisting of a focusing lens, a defocusing signal preamplifier and a piezoceramic micro-displacement actuator was set up, and the experimental study on the static characteristics of defocus error was carried out. The experimental results show that the system has a static resolution of ± 40 nm and a linear range of ± 5 μm, all meeting the design requirements.