To get the scattering loss of the trapezoidal core waveguide,a new analysis model is presented based on the perturbation equivalent method and modified effective-index method.Firstly,the trapezoidal core waveguide is successfully equivalent to the rectangular one with both restricting the same optical field energy by adopting the perturbation method.Then,the equivalent rectangular core waveguide is decomposed into two slab waveguides by employing the modified effective-index method.The trapezoidal core waveguide scattering theory model is established based on the slab waveguide scattering theory.With the sidewalls surface roughness in the range from 0 to 100 nm in the single model trapezodial core waveguide,optical simulation shows excellent agreement with the results from the scattering loss model presented.The relationship between the dimension and side-wall roughness with the scattering loss can be determined in the trapezoidal core waveguide by the scattering loss model.