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Using diborane as doping gas,p-doped μc-Si:H layers are deposited by using the plasma enhanced chemical vapour deposition (PECVD) technology.The effects of deposition pressure and plasma power on the growth and the properties of μc-Si:H layers are investigated.The results show that the deposition rate,the electrical and the structural properties are all strongly dependent on deposition pressure and plasma power.Boron-doped μc-Si:H films with a dark conductivity as high as 1.42 1 ·cm 1 and a crystallinity of above 50% are obtained.With this p-layer,μc-Si:H solar cells are fabricated.In addition,the mechanism for the effects of deposition pressure and plasma power on the growth and the properties of boron-doped μc-Si:H layers is discussed.
Using diborane as doping gas, p-doped μc-Si: H layers are deposited by using the plasma enhanced chemical vapor deposition (PECVD) technology. Effects of deposition pressure and plasma power on the growth and the properties of μc-Si: H layers are investigated. The results show that the deposition rate, the electrical and the structural properties are all strongly dependent on deposition pressure and plasma power. Boron-doped μc-Si: H films with a dark conductivity as high as 1.42 1 · cm 1 and a crystallinity of above 50% are obtained. Here this p-layer, μc-Si: H solar cells are fabricated. In addition, the mechanism for the effects of deposition pressure and plasma power on the growth and the properties of boron-doped μc-Si: H layers is discussed.