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引 言 光刻是一种精密的表面加工技术,是由照相和化学腐蚀相结合,在集成电路和半导体器件表面修刻的关键工艺。它最初出现在印刷照相制版上,由照相和化学腐蚀技术制取印刷用凸版,在1942年Fanl Zisla(英)发明了印刷布线技术,逐渐作为微细图形表面加工的方法推广到印刷电路中去。
Introduction Lithography is a sophisticated surface processing technique that combines photolithography and chemical etching to etch the surface of integrated circuits and semiconductor devices. It first appeared on photolithography and produced lithography for photographic and chemical etching. In 1942 Fanl Zisla invented the technology of printed wiring and gradually extended it to printed circuits as a method of microfabrication of surfaces.