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从PSD的基本方程Lucovskey方程出发,推出了反偏状态下的PSD在有稳态非均匀背景光照射下微分方程,并给出了其在双面分流型边界条件下的正规解,从而得出了PSD在稳态非均匀背景光照射下的位置输出特性。最后还建立了背景光影响下的位置误差估算公式。
Starting from the Lucovskey equation of the PSD of the PSD, the differential equation of the PSD under the non-uniform background illumination in the anti-bias state is derived and its normal solution is given under the double-sided shunt boundary conditions. The position output characteristics of PSD under steady non-uniform background illumination. Finally, the position error estimation formula under the influence of background light is also established.