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本文围绕离子束对材料(主要是金属材料)表面改性处理,分别扼要介绍了属于此范围的几项主要技术。即离子注入、离子束混合、各种离子束淀积等技术的研究和应用。并且还综述了我们在这方面所做的工作,主要有:离子注入改善电触头性能;离子束溅射淀积钨膜、钛膜,提高了铍的表面硬度;钢材表面处理提高了润滑性能,在光学玻璃上进行离子辅助镀膜的研究等等,经过这些方法处理的材料,表面性能均得到改善。
This article focuses on the surface modification of materials (mainly metal materials) by ion beam, and briefly introduces several main technologies in this range. Namely ion implantation, ion beam mixing, a variety of ion beam deposition technology research and application. In addition, the work we have done in this area is also reviewed. The ion implantation improves the electrical contact properties. Ion beam sputtering deposition of tungsten and titanium films enhances the surface hardness of beryllium. The surface treatment improves the lubricity , The study of ion-assisted coating on optical glass, etc., the surface properties of the materials treated by these methods are improved.