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采用钛合金制造的膜片与不锈钢膜片相比,其压力传感器的非线性误差降低1/3,YCB-10D应变压力传感器的非线性、迟滞、重复性均在0.2%～0.5%以内。文中着重介绍了Ti-10Mo-8V-1Fe-3Al合金的性能及热处理工艺。
Compared with the stainless steel diaphragm, the nonlinear error of the pressure sensor is reduced by 1/3. The nonlinearity, hysteresis and repeatability of YCB-10D strain pressure sensor are all within 0.2% ~ 0.5%. The paper mainly introduced the properties and heat treatment process of Ti-10Mo-8V-1Fe-3Al alloy.