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作者以丙酮和氢气作为反应气体,用微波PCVD法合成出金刚石薄膜。微波源的频率为2.45GHz,反应室为外径φ40的石英玻璃管。典型的生长条件是压力5～50Torr、总流量100SCCM、丙酮浓度0.4～2Vol％、微波功率约300W。在反应过程中,基片由于受到放电区各种活性粒子的冲击、温度可高达700～900℃。沉积产物的形貌和结构用扫描电镜、X射
The authors synthesize diamond films by microwave PCVD using acetone and hydrogen as reaction gases. Microwave source frequency of 2.45GHz, the reaction chamber for the outer diameter of φ40 quartz glass tube. Typical growth conditions are pressure 5 to 50 Torr, total flow 100 SCCM, acetone concentration 0.4 to 2 Vol%, microwave power about 300W. In the reaction process, the substrate due to the impact of the discharge of various active particles, the temperature can be as high as 700 ~ 900 ℃. The morphology and structure of the deposited products were observed by scanning electron microscopy and X-ray