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一、引言在CIMS 中,表面粗糙度是监控加工过程和工件质量的最重要的参数之一。虽然目前的轮廓仪可以精确地检测表面粗糙度,但它不适用于自动制造中的在线测量和控制,而且对于超精加工而言,往往不允许进行具有破坏性的接触式测量。为此,人们一直试图开发非接触式的光电方法和装置来检测表面粗糙度。虽然强度型光纤传感器具有结构简单和价格低廉等优点,但光源光强的漂移以及某些干扰光对传感器的信号稳定性有极大的影响。如果能够有效消除这种影响,使测量信号足够稳定,则这种传感器应用的前景将是十分广阔的。采用强度型光纤传感器检测表面粗糙度是基于散射的原理,所以测量结果不仅与工件的加工质量有关,而且也与工件表面的清洁程度直接有关。因此,在采用光电法检测表面粗糙度时,工件表面的清洁处理必须规范化,这对于确保测量重复性至关重要。
I. INTRODUCTION In CIMS, surface roughness is one of the most important parameters for monitoring process and workpiece quality. While current profilometers accurately detect surface roughness, it is not suitable for on-line measurement and control in automated manufacturing, and destructive contact measurement is often not permitted for superfinishing. To this end, people have been trying to develop non-contact photoelectric methods and devices to detect surface roughness. Although the intensity type optical fiber sensor has the advantages of simple structure and low price, the light source intensity drift and some interference light have a great influence on the signal stability of the sensor. If you can effectively eliminate this effect, the measurement signal is stable enough, then the prospects for the application of this sensor will be very broad. The detection of surface roughness using an intensity optical fiber sensor is based on the principle of scattering. Therefore, the measurement result is not only related to the quality of the workpiece but also directly related to the degree of cleaning of the surface of the workpiece. Therefore, in the use of photoelectric detection of surface roughness, the workpiece surface cleaning must be standardized, which is essential to ensure measurement repeatability.