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采用光栅谐振子为敏感元件,其输出信号以脉冲数形式输出。文中重点介绍了该传感器的工作原理和结构设计,讨论了光栅的探头形式、光栅间隙、条纹宽度和光电元件宽度的关系。
Using grating resonator as sensitive element, the output signal is output as pulse number. The paper mainly introduces the working principle and structure design of the sensor, and discusses the relationship between the grating type, grating gap, stripe width and photoelectric element width.