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用磁控溅射方法在不同单晶衬底材料上制备了一系列含La2/3Ca1/3MnO3(LCMO)薄膜。当薄膜厚度大于200?,在我们实验条件下可观测到金属-绝缘体转变,且转变温度随厚度和衬底材料而变化。渗流电阻模型被用来解释薄膜材料的电输运特性,结合薄膜外延特性(晶格失配)和薄膜与衬底的相互作用,及薄膜表面、界面粗糙度的测量可知薄膜的剩余电阻、极化子的激活能、金属-绝缘体转变温度等密切与薄膜质量相关。
A series of La2 / 3Ca1 / 3MnO3 (LCMO) films were prepared on different single crystal substrates by magnetron sputtering. When the film thickness is greater than 200 μm, a metal-insulator transition is observed under our experimental conditions and the transition temperature varies with the thickness and the substrate material. The seepage resistance model is used to explain the electrical transport properties of the thin film material. The combination of the epitaxial film properties (lattice mismatch) and the interaction between the film and the substrate, as well as the measurement of the film surface and interface roughness, Activator energy, the metal - insulator transition temperature and so closely related to the quality of the film.