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ＢＧ－１０１Ｊ分步光刻机检测记录（二）倍率误差检测一、工艺过程及条件前烘温度：９０℃光刻胶：ＫＴＩ８２０曝光当量：１２００显影温度：２０．５℃机器温度：２０℃±０．２℃气压前烘时间：２０分钟胶厚：１．２μｍ显影时间：４５ｓ日期：９４．１２．９湿度：４...
BG-101J stepper lithography test records (B) magnification error detection First, the process and conditions Pre-bake temperature: 90 ℃ photoresist: KTI820 exposure equivalent: 1200 Development temperature: 20.5 ℃ Machine temperature: 20 ℃ ± 0.2 ℃ Pressure before drying time: 20 minutes Glue: 1.2μm Development time: 45s Date: 94.12.9 Humidity: 4 ...