以正硅酸乙酯(TEOS)作为无机相前躯体,甲基三乙氧基硅烷(MTES)作为有机相前躯体,通过水解和缩聚反应,在Si—O—Si骨架上引入甲基制备成有机无机复合薄膜。通过控制成膜时的烘烤温度,可以有效的改变薄膜的疏水性。通过控制TEOS和MTES之间的摩尔比,对薄膜折射率的影响不大,但可以有效的控制薄膜的物理形态和介电常数。 Methyl triethoxysilane (MTES) as precursor of inorganic phase was prepared by using tetraethoxysilane (TEOS) as the precursor of the inorganic phase and methyl as a precursor of the organic phase by hydrolysis and polycondensation reaction to introduce methyl group into the Si-O-Si skeleton Organic-inorganic composite film. By controlling the baking temperature during film formation, the hydrophobicity of the film can be effectively changed. By controlling the molar ratio between TEOS and MTES, the refractive index of the film has little effect, but can effectively control the physical form and dielectric constant of the film.