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用射频磁控溅射法成功地制备了非晶碳薄膜及掺氮非晶碳薄膜。拉曼光谱表征表明所沉积的非晶碳薄膜是非晶结构，具有类金刚石特性。对所制备的掺氮非晶碳薄膜用光电子能谱和红外光谱进行了表征。同时还研究了两种薄膜的光学性质，为该类薄膜的实际应用提供了可靠的实验依据。
An amorphous carbon film and a nitrogen-doped amorphous carbon film were successfully prepared by RF magnetron sputtering. Raman spectroscopic characterization shows that the deposited amorphous carbon film is amorphous and diamond-like. The prepared nitrogen-doped amorphous carbon film was characterized by using photoelectron spectroscopy and infrared spectroscopy. At the same time, the optical properties of the two kinds of films were studied, which provided a reliable experimental basis for the practical application of the films.