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由操作人员引起元器件的静电损坏,正在迅速地成为电子工业中一个非常令人头痛的问题,集成电路制造业中先进工艺的采用,(例如:离子注入、离子束加工、电子束蚀刻等等)使得有可能制造出高性能,高电流密度的元件,这些元件通常具有极高的静电敏感性,没有什么简易的办法可了解这些元件在静电中的承受能力,通常都是进行静电破坏试验。表1列举不同形式元件的静电敏感性的概略范围。
Electrostatic damage to components caused by operators is rapidly becoming a very troubling issue in the electronics industry, with the adoption of advanced processes in integrated circuit manufacturing (eg, ion implantation, ion beam processing, electron beam etching, etc. ) Makes it possible to produce high performance, high current density components that are often extremely sensitive to static electricity. There is no easy way to understand the electrostatic capacity of these components, usually electrostatic destruction tests. Table 1 lists the approximate range of electrostatic sensitivities for different types of components.