我所于1978年引进的日本AEC-630型、双管、卧式、高频加热外延炉,现已使用四年多,运行达400余炉次.生产实践证明,该设备性能稳定,可靠性较高,外延膜厚度及电阻率均匀性达到或优于验收标准±10%.据1983年3、4两个月工艺记录的随机统计,21炉次的平均电阻率偏差为±8.3%;厚度偏差为±4.3%.其中,电阻率偏差<±5%的占50%;厚度偏差<±5%的占90%. Our Japan AEC-630 type, double tube, horizontal and high frequency heating epitaxial furnace, which was introduced in 1978, has been used for more than four years and has operated more than 400 heats. Production practice has proved that the equipment has stable performance and reliability Higher, epitaxial film thickness and resistivity uniformity to achieve or exceed the acceptance criteria ± 10%. According to 1983 3,4 two months of random records of technology records, 21 times the average resistivity deviation of ± 8.3%; thickness The deviation is ± 4.3%, among which, resistivity deviation is less than ± 5%, and thickness deviation is less than ± 5%.