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对于真空蒸镀得到的铝膜(厚度常为10~(-2)μm至1μm),利用改动后的迈克尔逊干涉仪可测量其厚度。将预先镀好基膜的玻片放在与镀膜工件等效的位置上,与工件同时镀膜,注意用遮挡的办法使玻片上待测膜的边缘呈平缓的斜坡,斜坡的一侧为待测膜,另一侧为裸露的基膜,如图1。(或在预先镀上边缘呈斜坡状的待测膜上,再镀上一层反射膜。)
For the vacuum evaporation of the resulting aluminum film (usually 10 -2 to 1 μm in thickness), the thickness of the film can be measured using a modified Michelson interferometer. Will be pre-plated basement glass slide on the equivalent position with the coating workpiece, and the workpiece at the same time coating, with the shadow of the film to be taken to make the edge of the slide showed a gentle slope, the side of the slope to be measured Membrane, the other side of the bare basement membrane, shown in Figure 1. (Or pre-plated with a slope of the edge of the film to be measured, and then coated with a reflective film.)