【摘 要】
:
Chlorine-implantation of silicon has a number of applications, for example, possible effects due to introduction of chlorine by plasma etching of silicon wafer
【机 构】
:
Centre for Research of Energy-Conversion Materials Hokkaido University,Sapporo,Japan,
【出 处】
:
IMP & HIRFL Annual Report
论文部分内容阅读
Chlorine-implantation of silicon has a number of applications, for example, possible effects due to introduction of chlorine by plasma etching of silicon wafer as a procedure of device techniques, or chlorine implantation as a proposed efficient n-type doping method. However, the microstructural evolution in chlorine-ion implanted silicon has not been systematically studied.Un the present work we carried out some study with emphasis on the dose dependence of microstructures. P-type silicon specimens were implanted
Chlorine-implantation of silicon has a number of applications, for example, possible effects due to introduction of chlorine by plasma etching of silicon wafer as a procedure of device techniques, or chlorine implantation as a proposed efficient n-type doping method. However, the microstructural evolution in chlorine-ion implanted silicon has not been systematically studied. Un the present work we carried out some study with emphasis on the dose dependence of microstructures. P-type silicon specimens were implanted
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