It is very important to research metallic ion beam production on ECR ion source. During the last several years, some good results were obtained by internal oven and MIVOC (Metallic ions from volatile compounds) methods in IMP. But it is very difficult to produce the refractory metallic ion heams. So it is more important to research refractory metallic ion beam production for us. High temperature oven and plasma It is very important to research metallic ion beam production on ECR ion source. Some good results were by internal oven and MIVOC (Metallic ions from volatile compounds) methods in IMP. But it is very difficult to produce the refractory metallic ion heams. So it is more important to research refractory metallic ion beam production for us