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经过量产验证的可持续性腔室清洗方案帮助芯片生产商在不断提高产能的同时,降低了由于设备保养而产生的负面影响。大部分的生产制造工艺都强调技术的解决方案和操作的可行性,而将设备的清洗、保养置于脑后。在现代化的纳米器件生产中,清洗扮演着一个至为关键的角色。
Production-proven, sustainable chamber cleaning solutions help chipmakers reduce the negative impact of equipment maintenance while continuously increasing productivity. Most manufacturing processes emphasize technical solutions and operational feasibility, leaving the cleaning and maintenance of equipment behind. Cleaning plays a crucial role in the production of modern nanodevices.