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我们为时间上具有严格要求的工业机器视觉应用研制了一种专用的成象器。这种摄象机可由程序控制以便以若干种分辨率进行操作。这是通过把邻近象元的信号电荷归并到传感器平面上而实现的。除此之外,读出窗口也被做成可由程序控制,并且增加了一种电子快门功能。这种256×256元的方形成象器是利用标准的1.5μm CMOS工艺制成的。读出以二相进行。一行电荷被平行传输给256个电荷敏感放大器后,这些信号便被耦合到一单个输出放大器中。通过控制放大器的地址顺序和复位脉冲,不同象元的电荷得到积累。这样一来,多种分辨率就可由程序控制。成象器以高达10MHz的数据速率操作,每秒约提供125整张图象。如果以更低的分辨率操作,则可以达到更高的帧速率。信噪比约为35dB。本文报导这种成象器的固定图案噪声、响应、速度和模糊特性。
We have developed a dedicated imager for industrial machine vision applications that have strict requirements on time. This camera can be programmed to operate at several resolutions. This is achieved by incorporating the signal charges of neighboring pixels onto the sensor plane. In addition, the read-out window is also made program-controlled, and an electronic shutter function is added. This 256 × 256 yuan square imager is made using a standard 1.5μm CMOS process. Read out in two phases. After a row of charges is transferred in parallel to 256 charge-sensitive amplifiers, these signals are coupled into a single output amplifier. By controlling the address sequence of the amplifier and the reset pulse, the charges of different pixels get accumulated. As a result, a variety of resolutions can be controlled by the program. The imager operates at data rates up to 10 MHz, providing approximately 125 full images per second. Higher frame rates can be achieved if operating at a lower resolution. Signal to noise ratio is about 35dB. This article reports the fixed pattern noise, response, speed, and blur characteristics of this imager.