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实验通过无氟的金属有机物液相沉积法在单晶LaAlO3(LAO)基底上生长La1-xSrxTiO3缓冲层,之后在其上生长YBa2Cu3O7-σ(YBCO)超导层,这种制备方法与真空沉积法和三氟乙酸金属有机物沉积法相比,具有成本低、效率高和环境友好等优点,对YBCO涂层导体的实际应用更具有研究价值。X射线衍射(XRD)结果表明,在LAO基底上生成了纯净的La1-xSrxTiO3膜,在La1-xSrxTiO3/LAO结构上生成了单相的YBCO膜,构成两种膜的晶粒均具有沿垂直于基底表面的c轴方向择优生长;通过半定量的能谱分析(EDS)确定缓冲层La1-xSrxTiO3为La0.47Sr0.53TiO3相,表明部分La元素挥发;扫描电子显微镜(SEM)结果表明在LAO基底上生成的La0.47Sr0.53TiO3膜平整光滑;在La0.47Sr0.53TiO3/LAO结构上生长的YBCO成膜颗粒聚集成片状,相互叠加生长,形成平行于基底表面的超导层。
The La1-xSrxTiO3 buffer layer was grown on a single-crystal LaAlO3 (LAO) substrate by fluorine-free metal-organic-liquid deposition, and then a YBa2Cu3O7-σ (YBCO) superconducting layer was grown thereon. This preparation method was compared with the vacuum deposition method Compared with the metal organic deposition method of trifluoroacetic acid, the method has the advantages of low cost, high efficiency and environment friendliness, and has more research value for the practical application of the YBCO coated conductor. X-ray diffraction (XRD) results show that a pure La1-xSrxTiO3 film is formed on the LAO substrate and a single-phase YBCO film is formed on the La1-xSrxTiO3 / LAO structure. The surface of the substrate was preferentially grown in the c-axis direction. La1-xSrxTiO3 was confirmed as La0.47Sr0.53TiO3 by semi-quantitative EDS, indicating that some La elements were volatilized. Scanning electron microscopy (SEM) The La0.47Sr0.53TiO3 films were smooth and smooth. The YBCO films grown on La0.47Sr0.53TiO3 / LAO were aggregated into sheets and superposed on each other to form a superconducting layer parallel to the substrate surface.