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基于三层多晶硅表面加工工艺和自适应光学经验公式,设计并制作了一种静电驱动的16单元连续面形微机电系统(MEMS)变形镜(DM),并用ZygoNewView7300白光干涉仪对样片的静态特性和动态响应特性进行了测试。静态测试结果表明,器件在150 V电压下的最大形变量为0.667μm,相邻单元之间的交联值为9%,镜面位置重复性为10%。动态测试结果表明,器件对正弦驱动信号的响应时间小于30μs,响应曲线近似为一条余弦曲线,谐振频率为36 kHz。该变形镜可用于自由空间光通信、激光光束整形、波前畸变校正、投影显示、生物医学成像和人眼视差校正等重要领域。
Based on the three-layer polycrystalline silicon surface processing technology and adaptive optics empirical formula, an electrostatically driven 16-cell continuous surface micro-electromechanical system (MEMS) deformable mirror (DM) was designed and fabricated. The static characteristics of the sample were measured with a ZygoNewView 7300 white light interferometer And dynamic response characteristics were tested. The static test results show that the maximum deformation of the device is 0.667μm under the voltage of 150 V, the cross-linking value between adjacent cells is 9%, and the repeatability of mirror position is 10%. The dynamic test results show that the response time of the device to the sinusoidal drive signal is less than 30μs and the response curve is approximately a cosine curve with a resonant frequency of 36 kHz. The deformable mirror can be used for free space optical communications, laser beam shaping, wavefront distortion correction, projection display, biomedical imaging and human eye parallax correction and other important areas.