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本文论述了微导向技术在接触/接近式光刻机中的发展过程和其重要意义,并对直线滚动式微导向技术的导向机理、特点和导向精度的保证措施进行了初步探讨。
This paper discusses the development of micro-guide technology in contact / proximity lithography and its significance. It also discusses the guide mechanism, characteristics and the guarantee of the guide precision of linear rolling micro-guide technology.