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北京大学初步建成能量直至兆电子伏级的离子加速器——离子注入设备系统。本文总结了北大重离子物理所离子束应用组几年来开展离子注入研究的工作,包括:开发应用微机计算离子射程分布的SARIS、TRION、MACA程序,其中后者可适用于高剂量注入动态靶;实验研究了MeV硼离子注入硅的分布,提出了多能注入形成平台载流子分布的实用方法;在离子注入高分子材料研究中观测到了增强氧化和C=C双键形成等现象,研究了光刻胶的离子束曝光特性;系统研究了应用离子束混熔技术在低碳钢表面形成的Al和Al合金镀层,大大提高了基体钢的耐腐蚀能力。
Peking University initially built ion accelerator up to megawatts - ion implantation equipment. This paper summarizes the ion implantation research work carried out by Peking University Institute of Heavy Ion Physics for several years, including the development and application of the SARIS, TRION and MACA programs for the calculation of ionospheric distribution by microcomputer, of which the latter is suitable for high dose injection of dynamic target; The distribution of silicon in MeV boron ions was experimentally studied, and a practical method of multi-energy injection to form carrier distribution in the platform was put forward. Phenomena such as enhanced oxidation and C = C double bond formation were observed in the study of ion implantation polymer materials. The ion beam exposure characteristics of photoresist were systematically studied. The Al and Al alloy coating formed on the surface of mild steel by ion beam mixing was systematically studied, which greatly enhanced the corrosion resistance of matrix steel.