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本文对微晶玻璃脆性材料的超精密磨削加工作了大量的实验研究。研究结果表明 ,对于微晶玻璃等脆性材料 ,其表面粗糙度主要与砂轮的平均磨粒尺寸、砂轮速度、进给量及磨削深度等因素有关。当采用超精密磨床并在 vs=12 0 0 m/ min、f=0～2 0 0μm/ rev、ap=0 .1～ 10μm条件下磨削时 ,只有当金刚石砂轮的平均磨粒尺寸低于 2 0μm,才能在塑性磨削模式下加工出高质量的光滑表面 ,其磨削后的表面粗糙度为 rms:8.0 2 1nm、Ra:6.2 0 0 nm。
In this paper, a great deal of experimental research has been done on the ultra-precision grinding of glass-ceramic brittle materials. The results show that for the brittle materials such as glass-ceramics, the surface roughness is mainly related to the average grain size, wheel speed, feed rate and grinding depth of the grinding wheel. When an ultra-precision grinding machine is used and grinded under conditions of vs = 12 0 0 m / min, f = 0 to 200 μm / rev, and ap = 0 to 1 μm, only when the average abrasive grain size of the diamond grinding wheel is below 2 0μm, in the plastic grinding mode can be processed out of high-quality smooth surface, the surface roughness after grinding rms: 8.0 2 1nm, Ra: 6.2 0 0 nm.