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针对具有同轴倾斜转镜式结构的新型傅里叶变换红外光谱仪进行了研究,该结构主要通过绕轴转动的倾斜反射镜组合和固定反射镜转折光路,产生连续变化的光程差,形成连续变化的干涉光强度.为了尽可能获取可靠的干涉光强度数据,获得准确的光谱信息,需要对系统的潜在误差进行研究,分析误差的来源和影响,确定系统的误差容限.通过模拟分析的手段,对倾斜反射镜组合和固定反射镜的误差进行了研究,确定了主要的误差来源、误差影响和误差允许范围,对系统误差容限形成了全面的认识.在此基础上,可以为同轴倾斜转镜式傅里叶变换红外光谱仪的制造和装配提供具体的数据参考.
A new type of Fourier transform infrared spectrometer with a coaxial tilting mirror structure was studied. The structure mainly consisted of a continuously changing optical path difference through a combination of a tilting mirror rotating around a shaft and a turning mirror of a fixed mirror to form a continuous In order to obtain reliable interference light intensity data as much as possible and obtain accurate spectral information, the potential error of the system needs to be studied, the origin and influence of the error and the error tolerance of the system must be analyzed.Through the simulation analysis The error of the tilting mirror combination and the fixed mirror is studied and the main sources of error, the influence of error and the allowable error range are determined, and a complete understanding of the systematic error tolerance is formed. On this basis, Axis tilting mirrors Fourier transform infrared spectrometer manufacturing and assembly to provide specific data reference.