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以钛酸正丁酯 [Ti(OBu) 4 ]、正硅酸乙酯 (TEOS)为原料 ,采用溶胶 凝胶 (sol gel)提拉方法在K9光学玻璃基片上镀制得高透过的λ/ 4～λ/ 2型宽带增透膜。该增透膜的表面均匀性良好 ,均方根粗糙度 (RMS)为 1.2 0 1,平均粗糙度 (RA)为 0 .934,具有一定的耐擦除性。经 2 0 0℃热处理 ,膜层中的OH吸收峰已基本消失 ,在 4 0 0～ 70 0nm光谱范围的透过率比基片的平均透过率提高 6 .6 %。为实现大面积涂覆“神光”装置主放大器的防爆隔板玻璃 ,大幅度提高主放大器的抽运效率奠定基础。
Using n-butyl titanate [Ti (OBu) 4] and tetraethyl orthosilicate (TEOS) as raw materials, high transmittance λ was coated on K9 optical glass substrate by sol-gel method / 4 ~ λ / 2 broadband AR coatings. The surface of the AR coating has good surface uniformity, root mean square roughness (RMS) of 1.2 0 1, average roughness (RA) of 0. 934, and certain scratch resistance. After heat-treated at 200 ° C, the OH absorption peak in the film has almost disappeared, and the transmittance in the spectrum range of 400~70 nm is higher than the average transmittance of the substrate by 6.6%. In order to achieve a large area of the “SG” main amplifier explosion-proof bulkhead glass, drastically improve the pumping efficiency of the main foundation.