由苯乙烯与二氧化硫共聚合生成的聚(苯乙烯砜)是一种良好的耐干法刻蚀的正性电子束阻蚀剂。近年来,国内外对其聚合条件以及作为阻蚀剂的物化性能等有较多的研究。但关于其热性能的研究报道甚少。Bowden等研究聚(苯乙烯砜)热降解时,发现其热分解温度在290℃以上。而国际商用机械公司(IBM)的报告则认为在135℃左 Poly (styrenesulfone), a copolymer of styrene and sulfur dioxide, is a good positive electron beam inhibitor for dry etching. In recent years, domestic and foreign polymerization conditions and as a corrosion inhibitor of physicochemical properties such as more research. However, there are few reports on its thermal properties. When Bowden et al. Studied the thermal degradation of poly (styrenesulfone), it was found that the thermal decomposition temperature was above 290 ° C. The International Business Machines Corporation (IBM) report that left at 135 ℃