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对于ZnO/36°YX-LiTaO3结构的Love波免疫传感器,免疫传感实验的结果表明,不同的波导层厚度,免疫传感的灵敏度不同.同时,存在最佳ZnO波导层厚度,使得Love波免疫传感器的灵敏度达到最高.本文根据多层薄膜中弹性波传播理论,运用部分波求解方法,对ZnO/36°YX-LiTaO3结构的Love波器件的相速度及相对质量灵敏度与波导层的厚度的关系进行了数值计算.计算结果表明,当相对于波长归一化膜厚为0~0.1范围内,随着波导层厚度的增加,Love波器件在无负载和有负载条件下的相速度均随之减少;相对质量灵敏度则先随波导层厚度的增加而增加,继而随波导层厚度的增加而减少,即存在一个适当值使得Love波器件的相对质量灵敏度最大,该结果与实验基本吻合.
For the Love wave immune sensor with ZnO / 36 ° YX-LiTaO3 structure, the results of the immunosensor experiments show that the sensitivities of the different waveguides and immunosensors are different, and at the same time, there is the optimal ZnO waveguide layer thickness, The sensitivities of the sensors reach the maximum.This paper, based on the theory of elastic wave propagation in multilayer thin films, uses the method of partial wave to analyze the relationship between phase velocity and relative mass sensitivity of ZnO waveguides and the thickness of waveguides in a ZnO / 36 ° YX-LiTaO3 structure The numerical results show that the phase velocities of Love wave devices under no-load condition and with load condition increase with the increase of waveguide layer thickness when the normalized film thickness is 0 ~ 0.1 with respect to the wavelength The relative mass sensitivity increases with the increase of the waveguide layer thickness and then decreases with the increase of the waveguide layer thickness. That is to say, there is an appropriate value to make the relative mass sensitivity of the Love wave device reach the maximum, which is in good agreement with the experiment.