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钛酸锶钡(Ba1-xSrxTiO3(BST))铁电薄膜材料在集成铁电器件领域具有很大的优势和潜力,BST与铂(Pt)等贵金属电极材料的界面特性限制了BST的实际应用,氧化物超导薄膜代替贵金属材料做底部电极取得了不少突破性的进展,综述了国内外研究人员对Ba1-xSrxTiO3(BST)/钙钛矿型氧化物超导薄膜异质结构和基本介电性能等方面的研究及成果。
Barium strontium titanate (Ba1-xSrxTiO3 (BST)) ferroelectric thin film material has great advantages and potential in the field of integrated ferroelectric devices. The interface properties between BST and platinum (Pt) and other noble metal electrode materials limit the practical application of BST, Oxide superconducting thin films have made a lot of breakthroughs instead of noble metal as bottom electrode. The domestic and foreign researchers reviewed the heterogeneity and basic dielectric properties of Ba1-xSrxTiO3 (BST) / perovskite oxide superconducting thin films Performance and other aspects of research and results.