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近年来利用离子注入技术对陶瓷材料进行表面改性已逐渐受到入门的关注[1—3]。本文报道了利用离子注入技术改善SiO2单晶表面的摩擦学性能,并用电子显微镜对N+离子注入后,SiO2单晶的表面微观结构进行了研究。结果与讨论本实验所用样品为用水热法合成的SiO2单晶。N+离子注入能量
In recent years, the use of ion implantation technology for surface modification of ceramic materials has gradually been the subject of attention [1-3]. In this paper, the tribological properties of SiO2 single crystal surface were improved by ion implantation, and the surface microstructure of SiO2 single crystal was studied by electron microscopy. Results and Discussion The samples used in this experiment are SiO2 single crystals synthesized hydrothermally. N + ion implantation energy